CR400 CRP Series Dry

Dr.Vakuum CR400

Cryopump — 400 mm flange

Photo

About

400 mm ISO-K flange. ~3,500 L/s for water, ~2,200 L/s for nitrogen. Sized for large-format coating chambers, semiconductor PVD tools, and space-environment simulation chambers.

Technical specifications

Inlet connection: ISO-K 400
Pumping speed (H₂O): ~ 3,500 L/s
Pumping speed (N₂): ~ 2,200 L/s
Pumping speed (Ar): ~ 1,800 L/s
Ultimate pressure: < 1×10⁻⁸ mbar
Cold head temperature: 10–20 K
Gross weight: ~ 110 kg