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Vacuum Pumps

Rotary vane, liquid ring, mechanical booster, dry screw, claw, turbomolecular and cryopumps — the full vacuum spectrum from rough to ultra-high.

rotary vane single stage

V Series

Single-stage, oil-lubricated rotary vane vacuum pumps — the industrial workhorse.

8 รุ่น

V10

10 m³/h single-stage rotary vane — smallest V Series model

V21

21 m³/h single-stage rotary vane

V40

40 m³/h single-stage rotary vane

V63

63 m³/h single-stage rotary vane

V100

100 m³/h single-stage rotary vane

V140

140 m³/h single-stage rotary vane

V301

300 m³/h — large industrial duty

V630

Largest V — 630 m³/h industrial duty

rotary vane two stage

DV Series

Two-stage rotary vane pumps — deeper vacuum than the V Series, for fine-vacuum applications.

6 รุ่น

DV10

10 m³/h two-stage rotary vane — deep ultimate vacuum

DV16

16 m³/h two-stage rotary vane

DV30

30 m³/h two-stage rotary vane

DV40

40 m³/h two-stage rotary vane

DV60

60 m³/h two-stage rotary vane

DV90

Largest DV — 90 m³/h two-stage rotary vane

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DR Series

Dry-running rotary vane — oil-free across vacuum (DRV), pressure (DRP) and combined vacuum + pressure (DRC).

rotary vane dry vacuum

DRV Series

Dry-running rotary vane vacuum pumps — oil-free vacuum for clean-process duty.

4 รุ่น

DRV10

Dry rotary vane vacuum pump — 12 m³/h, 27 in.Hg ultimate vacuum

DRV16

Dry rotary vane vacuum pump — 19 m³/h, 27 in.Hg

DRV25

Dry rotary vane vacuum pump — 30 m³/h, 27 in.Hg

DRV40

Largest DRV — 48 m³/h, 27 in.Hg

rotary vane dry pressure

DRP Series

Dry-running rotary vane compressors — oil-free pressure duty.

3 รุ่น

DRP60

Dry rotary pressure pump — 66 m³/h, 2.6 kW

DRP100

Dry rotary pressure pump — 117 m³/h, 3.7 kW

DRP140

Largest DRP — 161 m³/h, 5.5 kW

rotary vane dry combined

DRC Series

Dry-running combined vacuum + pressure — one pump for both sides of the process.

5 รุ่น

DRC200

Combination vacuum + pressure dry rotary vane — 218 m³/h

DRC250

Combination vacuum + pressure — 277 m³/h

DRC250-SK

High-vacuum variant of DRC250 — 250 mbar abs

DRC400

Combination vacuum + pressure — 462 m³/h

DRC500

Largest DRC — 571 m³/h

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L Series

Liquid ring vacuum pumps — for wet gases and chemical duty. Three sub-series by stage / form factor.

liquid ring single stage

LS Series

Single-stage liquid ring — split shaft, separate motor. 33–1013 mbar.

9 รุ่น

LS275-220

Single-stage liquid-ring — 630 m³/h, 15 kW, DN 100

LS275-260

Single-stage liquid-ring — 710 m³/h, 18.5 kW, DN 100

LS275-300

Single-stage liquid-ring — 800 m³/h, 22 kW, DN 100

LS410-260

Single-stage liquid-ring — 1,100 m³/h, 30 kW, DN 125

LS410-320

Single-stage liquid-ring — 1,350 m³/h, 37 kW, DN 125

LS410-400

Single-stage liquid-ring — 1,670 m³/h, 45 kW, DN 125

LS520-400

Single-stage liquid-ring — 2,100 m³/h, 55 kW, DN 200

LS520-530

Single-stage liquid-ring — 2,800 m³/h, 75 kW, DN 200

LS520-600

Largest LS — 3,600 m³/h, 90 kW, DN 200

liquid ring monobloc

LM Series

Single-stage monobloc liquid ring — pump and motor on one shaft, smaller footprint.

11 รุ่น

LM120-030

Monoblock liquid-ring — 25 m³/h, 0.75 kW, G1″

LM120-050

Monoblock liquid-ring — 52 m³/h, 1.5 kW, G1″

LM145-050

Monoblock liquid-ring — 80 m³/h, 2.2 kW, G1.5″

LM145-080

Monoblock liquid-ring — 110 m³/h, 4 kW, G1.5″

LM200-055

Monoblock liquid-ring — 72 m³/h, 2.2 kW, DN 40

LM200-065

Monoblock liquid-ring — 105 m³/h, 3 kW, DN 40

LM200-085

Monoblock liquid-ring — 134 m³/h, 4 kW, DN 40

LM230-090

Monoblock liquid-ring — 190 m³/h, 5.5 kW, DN 50

LM230-120

Monoblock liquid-ring — 210 m³/h, 5.5 kW, DN 50

LM270-110

Monoblock liquid-ring — 280 m³/h, 7.5 kW, DN 65

LM270-155

Largest LM — 382 m³/h, 11 kW, DN 65

liquid ring two stage

LT Series

Two-stage liquid ring — deeper vacuum, 5–33 mbar.

15 รุ่น

LT145-080

Two-stage liquid-ring — 54 m³/h, 6 kW, DN 32

LT185-050

Two-stage liquid-ring — 105 m³/h, 12 kW, DN 40

LT200-120

Two-stage liquid-ring — 150 m³/h, 14 kW, DN 40

LT200-170

Two-stage liquid-ring — 180 m³/h, 16 kW, DN 40

LT230-120

Two-stage liquid-ring — 260 m³/h, 30 kW, DN 50

LT230-160V

Two-stage liquid-ring — 330 m³/h, 35 kW, DN 50 (vacuum-optimised)

LT230-160M

Two-stage liquid-ring — 330 m³/h, 35 kW, DN 50 (mass-flow-optimised)

LT230-200

Two-stage liquid-ring — 390 m³/h, 40 kW, DN 50

LT230-220

Two-stage liquid-ring — 370 m³/h, 45 kW, DN 50

LT250-160

Two-stage liquid-ring — 430 m³/h, 40 kW, DN 65

LT250-200

Two-stage liquid-ring — 490 m³/h, 45 kW, DN 65

LT250-240

Two-stage liquid-ring — 540 m³/h, 50 kW, DN 65

LT275-160

Two-stage liquid-ring — 620 m³/h, 50 kW, DN 80

LT275-220

Two-stage liquid-ring — 730 m³/h, 60 kW, DN 80

LT275-260

Largest LT — 820 m³/h, 65 kW, DN 80

mechanical booster

MB Series

Mechanical (Roots) booster vacuum pumps — combined with a backing pump for high throughput at medium vacuum.

0 รุ่น

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DS Series

Dry screw vacuum pumps — three customer fits: complete sets (DSC), industrial open-frame (DSI), enclosed semicon with PLC (DSS).

screw complete

DSC Series

Complete-set screw vacuum — packaged units (oil-injected, oil-sealed, or dry).

0 รุ่น

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screw industrial

DSI Series

Industrial dry screw — open-frame, no enclosure.

4 รุ่น

DSI150

Industrial dry-screw vacuum pump — 150 m³/h, 0.05 mbar abs

DSI300

Industrial dry screw vacuum pump

DSI630

Industrial dry screw — 630 m³/h, 0.05 mbar abs

DSI1200

Largest DSI — 1,200 m³/h, 0.05 mbar abs

screw semicon

DSS Series

Semicon dry screw — enclosed with PLC control. For plasma clean and electronics duty.

0 รุ่น

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claw

CL Series

Dry-running claw vacuum pumps and compressors — oil-free, near-maintenance-free, for food, pharma and lab.

6 รุ่น

CL100

Dry-running claw vacuum pump — 100 m³/h, 50 mbar abs

CL251-V

Dry claw vacuum pump

CL200

Dry claw vacuum pump — 200 m³/h, 50 mbar abs

CL300-V

Dry claw vacuum pump

CL300

Dry claw vacuum pump — 300 m³/h, 50 mbar abs

CL400

Largest CL — 400 m³/h, 50 mbar abs

turbomolecular

T Series

Turbomolecular pumps — high vacuum and UHV.

0 รุ่น

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CR Series

Cryopumps — UHV for semiconductor process duty.

cryopump

CRP Series

Cryopumps — high-vacuum capture pumps with 10–20 K cold arrays. ISO-K flange sizes from 200 to 550 mm.

6 รุ่น

CR200

Cryopump — 200 mm flange, high-vacuum to UHV

CR250

Cryopump — 250 mm flange, mid-frame

CR300

Cryopump — 300 mm flange

CR400

Cryopump — 400 mm flange

CR500

Cryopump — 500 mm flange

CR550

Largest CR — 550 mm flange

cryocooler

CRC Series

Cryocoolers — Gifford-McMahon cold heads driving CR-Series cryopumps and cooling thermal stages directly.

0 รุ่น

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helium compressor

HC Series

Helium compressors — paired with CR cryopumps. Sold as matched pair.

3 รุ่น

HC50W

Helium compressor — 5 kW, drives small-format CR cryopumps

HC80W

Helium compressor — 8 kW, mid-frame

HC100W

Helium compressor — 10 kW, large CR systems