Dr.Vakuum

Products

Vacuum Pumps

Rotary vane, liquid ring, mechanical booster, dry screw, claw, turbomolecular and cryopumps — the full vacuum spectrum from rough to ultra-high.

Parent series 3 sub-series

DR Series

Dry-running rotary vane — oil-free across vacuum (DRV), pressure (DRP) and combined vacuum + pressure (DRC).

Parent series 3 sub-series

L Series

Liquid ring vacuum pumps — for wet gases and chemical duty. Three sub-series by stage / form factor.

mechanical booster

MB Series

Mechanical (Roots) booster vacuum pumps — combined with a backing pump for high throughput at medium vacuum.

0 models

Coming soon
Parent series 3 sub-series

DS Series

Dry screw vacuum pumps — three customer fits: complete sets (DSC), industrial open-frame (DSI), enclosed semicon with PLC (DSS).

screw complete

DSC Series

Complete-set screw vacuum — packaged units (oil-injected, oil-sealed, or dry).

0 models

Coming soon
screw semicon

DSS Series

Semicon dry screw — enclosed with PLC control. For plasma clean and electronics duty.

0 models

Coming soon
turbomolecular

T Series

Turbomolecular pumps — high vacuum and UHV.

0 models

Coming soon
Parent series 3 sub-series

CR Series

Cryopumps — UHV for semiconductor process duty.

cryocooler

CRC Series

Cryocoolers — Gifford-McMahon cold heads driving CR-Series cryopumps and cooling thermal stages directly.

0 models

Coming soon